Piezo-optomechanical coupling of a 3D microwave resonator to a bulk acoustic wave crystalline resonator

We report the observation of coupling between a 3D microwave cavity mode and a bulk mechanical resonator mediated by piezoelectric and radiation pressure effects. The system is composed of a quartz bulk acoustic wave resonator placed inside a microwave re-entrant cavity, which is designed to act as both the electrodes for piezoelectric actuation and a 3D resonator. The cavity electromagnetic mode is modulated by a 5 MHz bulk acoustic wave shear mode, which is modeled and experimentally verified using the input-output formalism. Through finite element method simulations, we calculate the various contributions to the electromechanical coupling and discuss the potential of the system to reach high cooperativities as well as suitable applications. Published under license by AIP Publishing.