Multi-Mode Vibration Suppression in 2-DOF Piezoelectric Systems Using Zero Placement Input Shaping Technique

This paper deals with the feedforward control of the vibrations of a 2-DOF piezoelectric micropositioner in order to damp the vibrations in the direct axes and in the cross-couplings. The actuator exhibit badly damped vibrations in its direct transfers as well as in the cross-couplings transfers. We therefore propose a bivariable control which does not require sensors to reduce the vibrations in the different axes. The proposed scheme reduces all modes of vibrations for both outputs through extending the monovariable zero placement input shaping technique into bivariable. Experimental tests have been carried out and demonstrate the efficiency of the proposed method.