A model of the electric field in a one-dimensional micro-mirror array and electromechanical simulations and optimization in a single cell
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | A model of the electric field in a one-dimensional micro-mirror array and electromechanical simulations and optimization in a single cell |
| Type de publication | Conference Paper |
| Year of Publication | 2017 |
| Auteurs | Nguyen DDuc, Trinh NNhat Binh, Lenczner M, Zamkotsian F, Cogan S |
| Conference Name | 2017 18TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) |
| Publisher | IEEE |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5090-4344-6 |
| Mots-clés | Bouncing Effect, micro-mirror array, Periodic Homogenization, Pull-In Voltage Analysis, Robust optimization |
| Résumé | This paper reports recent progress in modeling and simulation of a one-dimensional Micro-Mirror Array actuated by an electrostatic force. We present results obtained through numerical simulations of a single cell: the analysis and the optimization of the pull-in voltage and the analysis of the bounces of the mirror in contact with the base when it is subjected to a voltage exceeding the pull-in voltage. For the array, a model has been derived for the electrostatic field using a multi-scale modeling technique. The model is detailed together with simulation results. |