Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning |
| Type de publication | Conference Paper |
| Year of Publication | 2017 |
| Auteurs | Bouhadda I., Mohand-Ousaid A., Le Moal P., Bourbon G., Lutz P. |
| Editor | Charlot B, Mita Y, Nouet P, Pellet C, Pressecq F, Schneider P, Smith S |
| Conference Name | 2017 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP 2017) |
| Publisher | Lirmm Fr; IMS Bordeaux Fr; Cnrs Fr; Cmp Imag Fr; IEEE Components, Packaging & Mfg Technol Soc; Elemca Com; Cnes Fr; IEEE |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5386-2952-9 |
| Mots-clés | electrothermal actuator, MEMS, microfabrication, thermomechanical, U-shaped actuator |
| Résumé | This paper focuses on the dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning. Based on U-shape structure, such actuator has been employed in several MEMS applications where fine and repeatable positioning is required. The studied electrothermal actuator here is microfabricated on a doped SOI substrate and its dynamic response, during heating and cooling cycles, is recorded using precise and high-speed camera. To explain its dynamic behavior, FEM simulations, using Comsol multiphysics software facility, are carried out. The result of this numerical analysis shows a strong relationship between the temperature distribution and the displacement provided by the actuator. Finally, the influence of the dynamic behavior on the control of the actuator is discussed using experimental characterizations of its displacements under several voltage pulses with different frequencies. |