A Multiscale Model of a Two-Dimensional Micro-Mirror Array
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | A Multiscale Model of a Two-Dimensional Micro-Mirror Array |
| Type de publication | Conference Paper |
| Year of Publication | 2018 |
| Auteurs | Trinh NNhat Binh, Lenczner M, Zamkotsian F, Ranee N |
| Conference Name | 2018 19TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) |
| Publisher | IEEE |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5386-2359-6 |
| Mots-clés | Boundary Layer Correctors, micro-mirror array, Periodic Homogenization |
| Résumé | A methodology for the simulation of large two-dimensional micro-mirror arrays (MMA) whose behavior is governed by the static electro-mechanical system is presented. The considered array is actuated by two different voltages in two subdomains. The proposed solution makes it possible to perform simulations of an arbitrarily large size array without resorting to global calculations. It is built using principles derived from periodic homogenization, precisely it is composed of periodic solutions and boundary layer correctors. We discuss the model's interests in its implementation, its simulation and its integration into the MEMSALab software for automated construction of multi-scale models. |