MEMS ARRAY-TYPE MIRAU INTERFEROMETER FOR SWEPT-SOURCE OCT IMAGING WITH APPLICATIONS IN DERMATOLOGY
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | MEMS ARRAY-TYPE MIRAU INTERFEROMETER FOR SWEPT-SOURCE OCT IMAGING WITH APPLICATIONS IN DERMATOLOGY |
| Type de publication | Conference Paper |
| Year of Publication | 2017 |
| Auteurs | Gorecki C., Bargiel S., Passilly N., Gaiffe O., Froehly L., Lullin J., Perrin S. |
| Conference Name | 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
| Publisher | Minist Economy Affair, Taiwan; Minist Sci Technol, Taiwan; Executive Yuan, Taiwan; Kaohsiung City Govt, Taiwan; National Cheng Kung Univ; Natl Tsing Hua Univ; IEEE; IEEE Electron Devices Soc |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5386-2732-7 |
| Mots-clés | Microinterferometry, MOEMS scanner, OCT |
| Résumé | In the frame the European project VIAMOS (www.viamos.eu) we developed a microsystem based on Mirau interferometry and applied for optical coherence tomography (OCT) imaging of living tissues. The objective is to benefit from advanced MOEMS technologies, enabling a new generation of miniature and low-cost instruments using the concept of the swept-source OCT (SS-OCT) microsystem based on spectrally tuned Mirau interferometry, into which a doublet of microlens matrices (4x4) and a wafer of movable reference mirrors are included, building the active Mirau interferometer. |