A 2-Axis Electrothermal MEMS Micro-Scanner With Torsional Beam
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | A 2-Axis Electrothermal MEMS Micro-Scanner With Torsional Beam |
| Type de publication | Conference Paper |
| Year of Publication | 2016 |
| Auteurs | Tanguy QAA, Duan C, Wang W, Xie H, Bargiel S, Struk P, Lutz P, Gorecki C |
| Conference Name | 2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) |
| Publisher | IEEE; IEEE Photon Soc; Global Foundries; Nanyang Technolog Univ; Natl Univ Singapore; Univ Tokyo; Instrument Technol Res Ctr; Keysight Technologies; Ctr Intelligent Sensors & MEMS; Opt Sci & Engn Ctr |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5090-1035-6 |
| Mots-clés | dry photoresist lamination., electrothermal micromirror, MOEMS, Optical Coherence Tomography, torsion beam |
| Résumé | In this paper we introduce a 2-axis MEMS micro scanner with large scanning range of frame (32) and mirror (220) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate. |