Characterization of the positioning accuracy and precision of MEMS die servoing using model-based visual tracking
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Characterization of the positioning accuracy and precision of MEMS die servoing using model-based visual tracking |
| Type de publication | Conference Paper |
| Year of Publication | 2014 |
| Auteurs | Matusek O, Hotar V, Laurent GJ, Tamadazte B, Clevy C |
| Editor | Hajduk M, Koukolova L |
| Conference Name | INDUSTRIAL AND SERVICE ROBOTICS |
| Publisher | Europsky Fond Regionalneho Rozvoja; Agentura Ministerstva Skolstva, Vedy, Vyskumu Sportu SR Pre Strukturalne Fondy EU; Operacny Program Vyskum Vyvoj |
| Conference Location | KREUZSTRASSE 10, 8635 DURNTEN-ZURICH, SWITZERLAND |
| ISBN Number | 978-3-03835-202-0 |
| Mots-clés | MEMS visual servoing, micro-object tracking, Microassembly, microrobotic automation |
| Résumé | This work deals with an automated micro-assembly of MEMS die holders using a 3D visual servoing approach. Visual positioning which was used is based on eye-to-hand tracking principle. The 3D poses of the MEMS are supplied in a real-time by a 3D (CAD) model-based tracking algorithm. Having executed the visual servoing the accuracy and repeatability of this method was examined. The micro-assembly process was performed and the accuracy calculated according to ISO 9283. The achieved accuracy was 0.345 mu m and repeatability was 4.3 mu m. The rotation accuracy was less than 0.13 degrees. |
| DOI | 10.4028/www.scientific.net/AMM.613.426 |