In-situ Versatile Characterization of Carbon NanoTubes using Nanorobotics
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | In-situ Versatile Characterization of Carbon NanoTubes using Nanorobotics |
| Type de publication | Conference Paper |
| Year of Publication | 2019 |
| Auteurs | Clevy C, Sauvet B, Rauch J-Y, Lehmann O, Marionnet F, Lutz P, Beccacece L, Xavier S, Aubry R, Ziaei A, Prevot C, Laurent GJ |
| Editor | Haliyo S, Sill A, Zhou Q, Kallio P, Fatikow S |
| Conference Name | PROCEEDINGS OF 2019 4TH INTERNATIONAL CONFERENCE ON MANIPULATION, AUTOMATION AND ROBOTICS AT SMALL SCALES (MARSS 2019) |
| Publisher | Aalto Univ, Sch Elect Engn; Tampere Univ; Univ Oldenburg; IEEE Robot & Automat Soc; IEEE Nanotechnol Council; Finnish Soc Automat; Federat Finnish Learned Soc; Alemnis; Cheos Oy; Springer Nat |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-7281-0948-0; 978-1-7281-0949-7 |
| Résumé | The paper investigates electrical characterizations of CNTs (carbon nanotubes) within a SEM chamber. The originality of the proposed approach relies in its high versatility that is made possible thanks to nanoprobes moved by 6-DoF nanopositioning robots. Using this configuration, the influence of several factors are evaluated to know the electrical behavior of the measurement system. The paper presents several experimental characterizations of CNTs. The measured values of electrical resistance are in complete agreement with known results from the literature but were obtained in a much more versatile way. |