Size-dependent Analysis and Experiments of Bulk PMN-PT [001] Piezoelectric Actuator for MOEMS Micro-Mirrors
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Size-dependent Analysis and Experiments of Bulk PMN-PT [001] Piezoelectric Actuator for MOEMS Micro-Mirrors |
| Type de publication | Conference Paper |
| Year of Publication | 2014 |
| Auteurs | Ciubotariu DAdrian, Ivan JAlexandru, Clevy C, Lutz P |
| Conference Name | 2014 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM) |
| Publisher | IEEE; ASME; ICS; DSC; IEEE Robot Automat Soc; Robot Soc Japan; JSPE; IEEJ; JSME; Femto St Sci & Technol; Labe Act; SICE; GDR MACS; Univ Franche Comte; Univ Technologie Belfort Montbeliard; ENSMM; SFMC; CNRS |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-4799-5736-1 |
| Résumé | This paper presents the modeling, fabrication, FEM simulation and validation of a PMN-PT [001], bulk micro-actuator intended for integration in smart Micro-Opto-Electrical-Mechanicals Systems (MOEMS). Unlike the majority of piezoelectric materials, PMN-PT [001] has the ability to generate large-stroke out-of-plane actuation; this is due to its high longitudinal piezoelectric coefficient of up to 4500pm/V. After an introduction on MOEMS actuation, a concise modeling is given. The FEM simulations are then presented, highlighting actuation-induced shape specificities. The focus is placed on planar displacement and on possible shape generation. Actuation reached values as high as 680nm for a 200 mu m thick layer. Spherical shape generation was also studied. After presenting the fabrication of a basic piezo-patch mirror, the experimental verification is provided, outlining the influence of the contact interface size and nature. |