A Novel Model and Design of a MEMS Stirling Engine

In this paper, we present a new model and design of a MEMS Stirling machine. The concept could be used to provide electricity to low level power systems. A modified adiabatic model including losses of a Stirling engine such as regenerator thermal efficiency, wall conduction, pressure drop, hysteresis, membrane finite speed and squeeze film damping losses is presented. A base design machine is proposed. A parametric study is conducted and used to derive guidelines for miniature design. Compared to macro-scale design, the same trend was observed for the influence of the thermal performance regenerator. However, different trends from macroscopic engines were observed: conduction losses are of major importance due to the low power of the miniature engines, hysteresis losses in the bounce space are also of high amplitude due to the small size if this volume, the choice of the working gas leads to hydrogen or air and not helium. We computed that membrane finite speed losses and squeeze film damping losses can be neglected in the investigated machine size. The first part of the paper presents the micromachine specific features, the second part describes the model, the last part presents the base design results and design guidelines.