Application of Lagrangian Configuration to the Analysis of Electrostatically-driven MEMS Resonators
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Application of Lagrangian Configuration to the Analysis of Electrostatically-driven MEMS Resonators |
| Type de publication | Conference Paper |
| Year of Publication | 2014 |
| Auteurs | Arapan L, Dulmet B |
| Conference Name | 2014 European Frequency and Time Forum (EFTF) |
| Publisher | IEEE |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-4799-5252-6 |
| Résumé | This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically-driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator. |