Analytical modeling of mechanical behavior of structures: Comparative analysis, experimental validation and numerical correction with FEM of material defects generated by anisotropic etching
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| Titre | Analytical modeling of mechanical behavior of structures: Comparative analysis, experimental validation and numerical correction with FEM of material defects generated by anisotropic etching |
| Type de publication | Conference Paper |
| Year of Publication | 2014 |
| Auteurs | Bourouina H, Yahiaoui R, Yusifli E, Benamar MEl Amine, Sahar A |
| Editor | Buffiere JY, Brune M, Morel F, Nadot Y |
| Conference Name | FDMD II - JIP 2014 - FATIGUE DESIGN & MATERIAL DEFECTS |
| Publisher | E D P SCIENCES |
| Conference Location | 17 AVE DU HOGGAR PARC D ACTIVITES COUTABOEUF BP 112, F-91944 CEDEX A, FRANCE |
| ISBN Number | 978-2-7598-1274-5 |
| Résumé | This paper presented semi-analytical approach in order to investigate the influence of manufacturing process defects on the elasticity of thin microbeam. The Rayleigh Beam Model (RBM) will be analyzed and corrected using 3D FEM scripts including the effects of the cross-section shape and the under-etching. This model was tested on measurements of thin chromium microbeam of dimensions (80 x 2 x 0.95 mu m(3)). The results show that the influence of defects is very significant for the extracted value of Young's modulus where it is very close to the measured value and it is about 279.1 GPa. |
| DOI | 10.1051/matecconf/20141204002 |