Automatic Processing Scheme for Low Laser Invasiveness Electro Optical Frequency Mapping mode

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TitreAutomatic Processing Scheme for Low Laser Invasiveness Electro Optical Frequency Mapping mode
Type de publicationConference Paper
Year of Publication2016
AuteursBoscaro A., Jacquir S., Sanchez K., Terada H., Perdu P., Binczak S.
Conference NamePROCEEDINGS OF THE 2016 IEEE 23RD INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA)
PublisherIEEE; Electron Devices Soc; IEEE Singapore Reliabil CPMT ED Chapter; Reliabil Soc; FEI; Digit Concept
Conference Location345 E 47TH ST, NEW YORK, NY 10017 USA
ISBN Number978-1-4673-8258-8
Mots-cléscontrast enhancement, EOFM, EOP, Filtering, Stationary Wavelet Transform
Résumé

Electro optical techniques are efficient backside contactless techniques usually used for design debug and defect location in modern VLSI. Unfortunately, the signal to noise ratio is quite low and depends on laser power with potential device stress due to long acquisition time or high laser power, especially in up to date technologies. Under these conditions, to maintain a good signal or image quality, specific signal or image processing techniques can be implemented. In this paper, we proposed a new spatial filtering by stationary wavelets and contrast enhancement which allows the use of low laser power and short acquisition time in image mode.