FIB-induced damage in graphene electrodes for piezoelectric resonators<bold> </bold>
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | FIB-induced damage in graphene electrodes for piezoelectric resonators |
| Type de publication | Conference Paper |
| Year of Publication | 2018 |
| Auteurs | Saadani A., Lavenus P., Le Traon O., Heripre E., Sthal F. |
| Editor | Mailly F, Marcelli R, Mita Y, Nouet P, Pressecq F, Schneider P, Smith S |
| Conference Name | 2018 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP) |
| Publisher | IEEE; LIRMM FR; ARTOV IMM CNR IT; CNRS FR; CMP IMAG FR; IEEE Elect Packaging Soc |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5386-6199-4 |
| Mots-clés | Focused Ion Beam graphene etching, Graphene electrode, Quality factor, Quartz resonator, Viscoelactic losses |
| Résumé | A first vibrating inertial quartz resonator with graphene electrodes patterned by Focused Ion Beam (FIB) is presented in this paper. The first electrical measurements have however shown that the quality factor is below the theoretical expectation. Several hypotheses are analyzed. The FIB etching process of graphene can lead to the deposition of amorphous carbon. Its impact on the mechanical behavior of the resonator is examined. The effect of ion damages at the quartz surface through implantation and amorphization as well as intrinsic losses emerging from friction at the interface between graphene and quartz are furthermore discussed. |