Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator |
| Type de publication | Conference Paper |
| Year of Publication | 2015 |
| Auteurs | Hussein H, Le Moal P, Bourbon G, Haddab Y, Lutz P |
| Conference Name | 2015 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM) |
| Publisher | IEEE; ASME; Natl Robot Res Ctr; IEEE Ind Elect Soc; IEEE Robot & Automat Soc; ASME Dynam Syst & Control Div; Korea Robot Soc; Soc Instrument & Control Engineers; Inst Control Robot & Syst; JSME; IEEJ; JSPE; Robot Soc Japan; Creat Adv Robot Educ & Res Cons |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-4673-9107-8 |
| Résumé | The dynamic behavior of a U-shaped electrothermal actuator is investigated in this paper based on experimental findings and FEM simulations. Few previous works are found in the literature that have addressed the dynamic response of U-shaped actuators. A lack of data on the transient displacement of the actuator in the heating and cooling cycles is noted. Experiments are made in order to characterize the dynamic response of the actuator. The actuators are micro-fabricated on doped SOI wafers and the displacement is recorded with a high speed camera. FEM simulations are in good agreement with the experimental findings. Simulations and experiments show that the shape of displacement follows evolution of the temperature distribution inside the actuator. The influence of the dynamic behavior on the control of the actuator is finally discussed. |