Presentation and characterization of novel thick-film PZT microactuators
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Presentation and characterization of novel thick-film PZT microactuators |
| Type de publication | Journal Article |
| Year of Publication | 2016 |
| Auteurs | Chalvet V, Habineza D, Rakotondrabe M, Clevy C |
| Journal | PHYSICA B-CONDENSED MATTER |
| Volume | 486 |
| Pagination | 17-20 |
| Date Published | APR 1 |
| Type of Article | Article; Proceedings Paper |
| ISSN | 0921-4526 |
| Mots-clés | Cantilever, characterization, Creep, Dynamics, hysteresis, piezoelectric, Thinning |
| Résumé | We propose in this paper the characterization of a new generation of piezoelectric cantilevers called thick-films piezoelectric actuators. Based on the bonding and thinning process of a bulk PZT layer onto a silicon layer, these cantilevers can provide better static and dynamic performances compared to traditional piezocantilevers, additionally to the small dimensions. (C) 2015 Elsevier B.V. All rights reserved. |
| DOI | 10.1016/j.physb.2015.11.007 |