Near-field Microwave CPW Antenna for Scanning Microscopy

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TitreNear-field Microwave CPW Antenna for Scanning Microscopy
Type de publicationConference Paper
Year of Publication2017
AuteursBen Mbarek S, Choubani F, Cretin B
Conference Name2017 11TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP)
PublisherMicrowave Vision Grp; Comp Simulat Technol AG; Keysight Technologies Inc; Altair Engn GmbH; ESA; ANSYS; CEA Leti; Telecom ParisTech
Conference Location345 E 47TH ST, NEW YORK, NY 10017 USA
ISBN Number978-8-8907-0187-0
Mots-clésco-planar waveguide, CPW antenna, Near-field microscopy
Résumé

In this work, we present a non-conventional coplanar microwave antenna for near-field applications. This electrical probe is a combination of coplanar line and the point effect. We achieved prototypes of micro-antennas using the clean room techniques. To overcome the oxidation problem, we chose gold as metal structure. We used an oxidized silicon substrate in order to reduce losses in the silicon. Performed measurements and simulations have shown that the antenna is mainly sensitive to the longitudinal electric field. The estimated sensitivity is 30 mu V/(V/m).