Near-field Microwave CPW Antenna for Scanning Microscopy
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Titre | Near-field Microwave CPW Antenna for Scanning Microscopy |
Type de publication | Conference Paper |
Year of Publication | 2017 |
Auteurs | Ben Mbarek S, Choubani F, Cretin B |
Conference Name | 2017 11TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP) |
Publisher | Microwave Vision Grp; Comp Simulat Technol AG; Keysight Technologies Inc; Altair Engn GmbH; ESA; ANSYS; CEA Leti; Telecom ParisTech |
Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
ISBN Number | 978-8-8907-0187-0 |
Mots-clés | co-planar waveguide, CPW antenna, Near-field microscopy |
Résumé | In this work, we present a non-conventional coplanar microwave antenna for near-field applications. This electrical probe is a combination of coplanar line and the point effect. We achieved prototypes of micro-antennas using the clean room techniques. To overcome the oxidation problem, we chose gold as metal structure. We used an oxidized silicon substrate in order to reduce losses in the silicon. Performed measurements and simulations have shown that the antenna is mainly sensitive to the longitudinal electric field. The estimated sensitivity is 30 mu V/(V/m). |