Influence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition

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TitreInfluence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition
Type de publicationConference Paper
Year of Publication2016
AuteursMaertens A, Margueron S, Genty F, Abrutis A, Belmonte T, Boulet P, Ghanbaja J, Talbi A, Bartasyte A
Conference Name2016 COMPOUND SEMICONDUCTOR WEEK (CSW) INCLUDES 28TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE & RELATED MATERIALS (IPRM) & 43RD INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS (ISCS)
PublisherIEEE
Conference Location345 E 47TH ST, NEW YORK, NY 10017 USA
ISBN Number978-1-5090-1964-9