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Titre | Influence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition |
Type de publication | Conference Paper |
Year of Publication | 2016 |
Auteurs | Maertens A, Margueron S, Genty F, Abrutis A, Belmonte T, Boulet P, Ghanbaja J, Talbi A, Bartasyte A |
Conference Name | 2016 COMPOUND SEMICONDUCTOR WEEK (CSW) INCLUDES 28TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE & RELATED MATERIALS (IPRM) & 43RD INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS (ISCS) |
Publisher | IEEE |
Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
ISBN Number | 978-1-5090-1964-9 |