Study of TiO2 nanomembranes obtained by an induction heated MOCVD reactor

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TitreStudy of TiO2 nanomembranes obtained by an induction heated MOCVD reactor
Type de publicationJournal Article
Year of Publication2015
AuteursCrisbasan A., Chaumont D., Sacilotti M., Crisan A., Lazar A.M, Ciobanu I., Lacroute Y., Chassagnon R.
JournalAPPLIED SURFACE SCIENCE
Volume358
Pagination655-659
Date PublishedDEC 15
Type of ArticleArticle; Proceedings Paper
ISSN0169-4332
Mots-clésMOCVD, Nanomembranes, Nanostructures, TiO2
Résumé

Nanostructures of TiO2 were grown using the metal oxide chemical vapor deposition (MOCVD) technique. The procedure used induction heating on a graphite susceptor. This specific feature and the use of cobalt and ferrocene catalysts resulted in nanomembranes never obtained by common MOCVD reactors. The present study discusses the preparation of TiO2 nanomembranes and the dependence of nanomembrane structure and morphology on growth parameters. (C) 2015 Elsevier B.V. All rights reserved.

DOI10.1016/j.apsusc.2015.09.113