Experimental procedure to design stressed HBAR devices when the third-order elastic constants are not known
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Experimental procedure to design stressed HBAR devices when the third-order elastic constants are not known |
| Type de publication | Conference Paper |
| Year of Publication | 2016 |
| Auteurs | Thomas B, Ludovic B, Valerie P, Gilles M, Bernard D, Jean-Marc L |
| Conference Name | 2016 EUROPEAN FREQUENCY AND TIME FORUM (EFTF) |
| Publisher | IEEE |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5090-0720-2 |
| Mots-clés | High-overtone Bulk Acoustic Resonators (HBAR) component, oscillator, packaging, vibration sensitivity |
| Résumé | Vibration sensitivity is an important specification for oscillators dedicated to space or airborne systems. For some crystallographic material, some physical constant are not yet measured. So, computation of stress coefficients of frequency is not possible. This paper presents a simple experimentation which allows the determination of the six stress coefficients of frequency for each high-overtone bulk acoustic resonators configuration. The first three coefficient are (s)alpha(mn) are -2.9x10(-12)/Pa, 4.3x10(-10)/Pa and 9.4x10(-11)/Pa. The relative standard deviation can be high due to experimental uncertainty. |