High-Q and low TCF HBAR based on LiTaO3 substrate
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | High-Q and low TCF HBAR based on LiTaO3 substrate |
| Type de publication | Conference Paper |
| Year of Publication | 2014 |
| Auteurs | Thomas B, Gilles M, Nicolas C, Valerie P, Guillaume C, Fabien H, Florent B, Jean-Marc L, David R, Luc C, Sylvain B |
| Conference Name | 2014 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS) |
| Publisher | IEEE; UFFC; Asia Pacific Metrol Programme; Minist Sci & Technol; NAR Labs; Instrument Technol Res Ctr; Sensors & Actuators Tech; Tsing Hua Univ |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-4799-4916-8 |
| Mots-clés | High-overtone Bulk Acoustic Resonators (HBAR) component, oscillator, phase noise, Q.f product, temperature coefficient of frequency (TCF) |
| Résumé | This work presents a comparison between three different High-overtone Bulk Acoustic Resonators based on different materials. Furthermore, the goal of this work is to realize a High-overtone Bulk Acoustic Resonators presented a temperature coefficient of frequency less than 10 ppm over a wide range of temperature around a turnover temperature, and a Q.f product higher than 5x10(13) Hz. After a discussion about the choice of materials to achieve such resonator and the description of our microfabrication, three High-overtone Bulk Acoustic Resonators based on a Lithium of Niobate, Quartz, Lithium of Tantalate, AlN and Sapphire materials are compared in term of the temperature coefficient of frequency, the Q.f product and the phase noise. The new HBAR exhibits a Q.f product around 3.7x10(13) Hz, a turnover around 55 degrees C with a parabolic shape and a temperature coefficient of frequency around +/-4 ppm/K. |