High-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy

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TitreHigh-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy
Type de publicationJournal Article
Year of Publication2015
AuteursRabus D., Friedt J.M, Ballandras S., Baron T., Lebrasseur E., Carry E.
JournalJOURNAL OF APPLIED PHYSICS
Volume118
Pagination114505
Date PublishedSEP 21
Type of ArticleArticle
ISSN0021-8979
Résumé

In the context of direct detection sensors with compact dimensions, we investigate the gravimetric sensitivity of high-overtone bulk acoustic resonators, through modeling of their acoustic characteristics and experiment. The high frequency characterizing such devices is expected to induce a significant effect when the acoustic field boundary conditions are modified by a thin adlayer. Furthermore, the multimode spectral characteristics are considered for wideband acoustic spectroscopy of the adlayer, once the gravimetric sensitivity dependence of the various overtones is established. Finally, means of improving the gravimetric sensitivity by confining the acoustic field in a low acoustic-impedance layer is theoretically established. (C) 2015 AIP Publishing LLC.

DOI10.1063/1.4930032