Characterization of materials for the design of wireless SAW sensors in a high temperature environment
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Characterization of materials for the design of wireless SAW sensors in a high temperature environment |
| Type de publication | Conference Paper |
| Year of Publication | 2016 |
| Auteurs | Guillaume W, Thomas B, Lilia A, Bernard D, Jean-Marc L |
| Conference Name | 2016 IEEE International Frequency Control Symposium (IFCS) |
| Publisher | IEEE; UFFC |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5090-2091-1 |
| Mots-clés | High temperature, MEMS, SAW, Sensor |
| Résumé | In this work, we describe an experiment performed to analyze the behavior of materials deposited on an oxidized silicon substrate submitted to high temperature conditions (650 degrees C to 1000 degrees C). This process developed in FEMTO-ST institute aims to characterize materials of potential interest for wireless SAW (Surface Acoustic Wave) sensors in a ``high temperature'' environment. The analysis indicates that three kinds of sublayer/electrode pairs (W/Mo, Ta/W and Ta/Mo) are good candidates for further developments in actual sensing devices. |