Spatial correction in dynamic photon emission by affine transformation matrix estimation

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TitreSpatial correction in dynamic photon emission by affine transformation matrix estimation
Type de publicationConference Paper
Year of Publication2014
AuteursChef S., Jacquir S., Perdu P., Sanchez K., Binczak S.
Conference Name2014 IEEE 21ST INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA)
PublisherIEEE; FEI Co USA; IEEE Singapore Reliabl CPMT ED Chapter; Elect Devices Soc; Reliabl Soc
Conference Location345 E 47TH ST, NEW YORK, NY 10017 USA
ISBN Number978-1-4799-3929-9
Résumé

Photon emission microscopy and Time Resolved Imaging have proved their efficiency for defect localization on VLSI. A common process to find defect candidate locations is to draw a comparison between acquisitions on a normally working device and a faulty one. In order to be accurate and meaningful, this method requires that the acquisition scene remains the same between the two parts. In practice, it can be difficult to set. In this paper, a method to correct position by affine matrix transformation is suggested. It is based on image features detection, description and matching and affine transformation estimation.