A TWO-DIMENSIONAL ELECTROSTATIC MODEL OF INTERDIGITATED COMB DRIVE IN LONGITUDINAL MODE
Affiliation auteurs | Affiliation ok |
Titre | A TWO-DIMENSIONAL ELECTROSTATIC MODEL OF INTERDIGITATED COMB DRIVE IN LONGITUDINAL MODE |
Type de publication | Journal Article |
Year of Publication | 2020 |
Auteurs | Gaudiello A, Lenczner M |
Journal | SIAM JOURNAL ON APPLIED MATHEMATICS |
Volume | 80 |
Pagination | 792-813 |
Type of Article | Article |
ISSN | 0036-1399 |
Mots-clés | comb drive, electrostatic forces, homogenization, MEMS |
Résumé | A periodic homogenization model of the electrostatic equation is constructed for a comb drive with a large number of fingers and whose mode of operation is in-plane and longitudinal. The model is obtained in the case where the distance between the rotor and the stator is of an order epsilon(alpha), alpha >= 2 where epsilon denotes the period of distribution of the fingers. The model derivation uses the two-scale convergence technique. Strong convergences are also established. This allows us to find, after a proper scaling, the limit of the electrostatic force applied to the rotor in the longitudinal direction. |
DOI | 10.1137/19M1270306 |