Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD
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| Titre | Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD |
| Type de publication | Journal Article |
| Year of Publication | 2014 |
| Auteurs | Avril L., Boudon J., de Lucas M.CMarco, Imhoff L. |
| Journal | VACUUM |
| Volume | 107 |
| Pagination | 259-263 |
| Date Published | SEP |
| Type of Article | Article; Proceedings Paper |
| ISSN | 0042-207X |
| Mots-clés | alpha-Al2O3-TiO2 composite films, Colloidal suspension, Liquid injection, MOCVD single-step deposition |
| Résumé | The use of a liquid injection delivery system to form composite films containing nanoparticles was investigated. Al2O3-TiO2 films were grown on silicon substrates by direct liquid injection MOCVD (DLI-MOCVD) at 400 degrees C. The alpha-Al2O3 nanoparticles (alpha-Al(2)O(3)NPs) dispersed in TiO2 films resulted from co-deposition using colloidal alpha-Al2O3 solution and titanium tetraisopropoxide as titanium precursor. Scanning electron microscopy coupled with EDS as well as Raman spectroscopy confirmed the presence of alpha-Al(2)O(3)NPs aggregates embedded in the TiO2 matrix. The liquid injection system coupled with CVD technique can be promising to form composite films containing preformed nanoparticles. (C) 2014 Elsevier Ltd. All rights reserved. |
| DOI | 10.1016/j.vacuum.2014.02.020 |