Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
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Titre | Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization |
Type de publication | Journal Article |
Year of Publication | 2020 |
Auteurs | Rabenimanana T, Walter V, Kacem N, Le Moal P, Bourbon G, Lardies J |
Journal | APPLIED PHYSICS LETTERS |
Volume | 117 |
Pagination | 033502 |
Date Published | JUL 20 |
Type of Article | Article |
ISSN | 0003-6951 |
Résumé | In order to overcome mode aliasing limitation in linear mode-localized sensors, we demonstrate in this Letter both theoretically and experimentally how to tune the electrostatic nonlinearity and exceed the ultimate sensitivity reachable in the linear regime. A mass sensor composed of two coupled micro-cantilevers with different lengths is considered and the results show that the sensitivity can be significantly enhanced up to 67%. By performing experiments on the fabricated device and depositing the mass perturbation with a focused ion beam, the same phenomenon was observed. These promising results open the way toward ultrasensitive multimodal microsensors with functionalized nonlinearities. |
DOI | 10.1063/5.0007446 |