Overcoming limitations of nanomechanical resonators with simultaneous resonances

Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically actuated, piezoresistively transduced nanomechanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to very large amplitudes compared to fundamental limits like pull-in occurrence, opening the way towards resonators with high frequency stability for high-performance sensing or time reference. (C) 2015 AIP Publishing LLC.