A 2-AXIS MEMS SCANNING MICROMIRROR WITH A 45 degrees AUTO-POSITIONING MECHANISM FOR ENDOSCOPIC PROBE
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | A 2-AXIS MEMS SCANNING MICROMIRROR WITH A 45 degrees AUTO-POSITIONING MECHANISM FOR ENDOSCOPIC PROBE |
| Type de publication | Conference Paper |
| Year of Publication | 2017 |
| Auteurs | Tanguy QAA, Bargiel S, Duan C, Wang W, Struk P, Xie H, Lutz P, Gorecki C |
| Conference Name | 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
| Publisher | Minist Economy Affair, Taiwan; Minist Sci Technol, Taiwan; Executive Yuan, Taiwan; Kaohsiung City Govt, Taiwan; National Cheng Kung Univ; Natl Tsing Hua Univ; IEEE; IEEE Electron Devices Soc |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5386-2732-7 |
| Mots-clés | 3D optical micro-scanner, dual-reflective mirror, electrothermal, Endoscopy, mechanical stopper, MEMS, MOEMS fabrication, OCT |
| Résumé | In this paper, we report a novel 2-axis electrothermal MEMS micro-scanner with an initial tilt at 45 degrees out of its support plane. A new type of mechanical stopper is designed to hold the structure in the initial oblique bending position, which enables a cross axis decoupling. The micro-scanner is a key component of a fully integrated endoscopic imaging probe for 3D Swept Source (SS) Optical Coherence Tomography (OCT) imaging system and is developed with the objective of proposing an assembly adapted for industrial manufacturing. |