NONLINEAR STATIC AND DYNAMIC BEHAVIOR OF AN IMPERFECT CIRCULAR MICROPLATE UNDER ELECTROSTATIC ACTUATION

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TitreNONLINEAR STATIC AND DYNAMIC BEHAVIOR OF AN IMPERFECT CIRCULAR MICROPLATE UNDER ELECTROSTATIC ACTUATION
Type de publicationConference Paper
Year of Publication2017
AuteursJallouli A, Kacem N, Lardies J
Conference NamePROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2017, VOL 4
PublisherASME, Design Engn Div; ASME, Comp & Informat Engn Div
Conference LocationTHREE PARK AVENUE, NEW YORK, NY 10016-5990 USA
ISBN Number978-0-7918-5816-5
Résumé

In this article, we investigate the nonlinear static and dynamic behavior of a clamped circular microplate in presence of imperfections. By taking in account the von Ketrman nonlinearity, the geometrical imperfections lead to a significant delay in static pull-in occurrence. Numerical simulations are performed in the frequency domain to study the dynamic behavior under primary resonance. A parametric analysis is conducted with respect to actuation voltages and initial deflection in order to capture the competition between hardening and softening behavior. Interestingly, we show that a geometric imperfection can change the type of nonlinear response from softening to hardening. In practice, the imperfection can be functionalized to enhance the performances of capacitive micromachined ultrasonic transducers.