Stealth dicing with ultrafast Bessel beams with engineered transverse profiles
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Stealth dicing with ultrafast Bessel beams with engineered transverse profiles |
| Type de publication | Conference Paper |
| Year of Publication | 2017 |
| Auteurs | Meyer R., Safioui J., Giust R., Lacourt P.-A, Furfaro L., Dudley J.M, Courvoisier F. |
| Conference Name | 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) |
| Publisher | IEEE |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-9435-8027-9 |
| Résumé | We investigate high-speed glass cleaving with ultrafast laser beams with engineered transverse intensity profile. We achieve accuracy of similar to 1 mu m at 25 mm/s and drastically enhance cleavability compared to standard Bessel beams. |