Piezoelectric and Pyroelectric Energy Harvesting from Lithium Niobate Films

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TitrePiezoelectric and Pyroelectric Energy Harvesting from Lithium Niobate Films
Type de publicationConference Paper
Year of Publication2019
AuteursClementi G., Margueron S., Suarez M.A, Baron T., Dulmet B., Bartasyte A.
Conference Name18TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS
PublisherTransducers Research Foundation; Univ Sherbrooke; Univ Florida; Univ Utah; HRL Labs
Conference LocationDIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND
Résumé

Single-crystalline LiNbO3 films were studied as a pyro- and piezo-electric transducer for energy harvesting applications. Two types of devices: piezoelectric cantilever (PiEH) and pyroelectric chip (ThEH) were microfabricated. Different types of characterization were done, starting from a comparison of finite element method (FEM) simulated eigen-frequencies of cantilever beam and optical vibrometer measurements. According to electrical characterization, resonance frequencies of two cantilevers with different thickness were 1.26 kHz and 485 Hz with generated spontaneous power of 14 mu W and 4 mu W at 275-300 k Omega, respectively. Finally thermal characterization of pyroelectric samples showed voltage amplitudes ranging from 1 to 2.5mV in the temperature range of 50-200 degrees C.

DOI10.1088/1742-6596/1407/1/012039