Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks

Affiliation auteurs!!!! Error affiliation !!!!
TitreAdvanced microfabrication technologies for miniature caesium vapor cells for atomic clocks
Type de publicationConference Paper
Year of Publication2019
AuteursGorecki C., Maurice V., Boudot R., Bargiel S., Passilly N., Chutani R., Vicarini R., Galliou S.
EditorShahriar SM, Scheuer J
Conference NameOPTICAL, OPTO-ATOMIC, AND ENTANGLEMENT-ENHANCED PRECISION METROLOGY
PublisherSPIE
Conference Location1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
ISBN Number978-1-5106-2511-2
Mots-clésCPT, MEMS/ MOEMS, miniature atomic clock
Résumé

This paper presents an overview of technologies of MEMS Cs microcells for CPT-based atomic clocks, obtained in FEMTO-ST Institute over the last decade. We discuss the challenges in microfabrication of miniature cells: the different configurations of cells, two methods for filling alkali vapor cells with Cs from a dispenser pill and from the dispensing paste, and a study on the permeability of our microcells to the buffer gas limiting the sealing performances. Finally, we report on the aging tests and resulting short-term and long-term clock stability measurements.

DOI10.1117/12.2506225