Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks
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Titre | Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks |
Type de publication | Conference Paper |
Year of Publication | 2019 |
Auteurs | Gorecki C., Maurice V., Boudot R., Bargiel S., Passilly N., Chutani R., Vicarini R., Galliou S. |
Editor | Shahriar SM, Scheuer J |
Conference Name | OPTICAL, OPTO-ATOMIC, AND ENTANGLEMENT-ENHANCED PRECISION METROLOGY |
Publisher | SPIE |
Conference Location | 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA |
ISBN Number | 978-1-5106-2511-2 |
Mots-clés | CPT, MEMS/ MOEMS, miniature atomic clock |
Résumé | This paper presents an overview of technologies of MEMS Cs microcells for CPT-based atomic clocks, obtained in FEMTO-ST Institute over the last decade. We discuss the challenges in microfabrication of miniature cells: the different configurations of cells, two methods for filling alkali vapor cells with Cs from a dispenser pill and from the dispensing paste, and a study on the permeability of our microcells to the buffer gas limiting the sealing performances. Finally, we report on the aging tests and resulting short-term and long-term clock stability measurements. |
DOI | 10.1117/12.2506225 |