Displacement of Microparticles on Surface Acoustic Wave Delay Line using High RF Power

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TitreDisplacement of Microparticles on Surface Acoustic Wave Delay Line using High RF Power
Type de publicationConference Paper
Year of Publication2018
AuteursPaquit M, Djoumi L, Vanotti M, Soumann V, Martin G, Blondeau-Patissier V, Baron T
Conference Name2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
PublisherIEEE
Conference Location345 E 47TH ST, NEW YORK, NY 10017 USA
ISBN Number978-1-5386-3425-7
Mots-clésdelay line, high power radio-frequency signal, microparticle, Surface Acoustic Wave
Résumé

In this paper we investigate the displacement of microparticles deposited on the acoustic path of a surface acoustic wave delay line. The diameter of the targeted particles is between 0.3 um and 10 um. The device used is based on Rayleigh waves and builds on 128 YX-LiNbO3 piezoelectric substrate. The displacement is achieved by applying a radio frequency signal with a high power level superior to 30 dBm at approximately 100 MHz. Particles originates from the fume of a burning candle with diameter smaller than 2.5 um, and particles of silicon carbide in the vicinity of 17 um and 5 um are tested.