Fabrication and characterization of micromachined micro-axicons made by micro glass blowing process
| Affiliation auteurs | !!!! Error affiliation !!!! |
| Titre | Fabrication and characterization of micromachined micro-axicons made by micro glass blowing process |
| Type de publication | Conference Paper |
| Year of Publication | 2018 |
| Auteurs | Gorecki C, Carrion JVincente, Passilly N, Bargiel S |
| Conference Name | 2018 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) |
| Publisher | Soc Micro & Nano Syst; Optical Soc Korea; IEEE photon Soc; Swiss Natl Sci Fdn; LIGENTEC; CSEM; Swiss Photon; SUSS Microopt; IEEE; European Optical Soc; PHOTONICS 21; MEMS Journal |
| Conference Location | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| ISBN Number | 978-1-5090-6374-1 |
| Mots-clés | Bessel beam, micro-axicon, MOEMS |
| Résumé | The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of microoptical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication method for micromachined micro-axicons in borosilicate glass. The generation of Bessel beams is demonstrated and experimentally validated. |