A Tool for Aided Multi-Scale Model Derivation and its Application to the Simulation of a Micro Mirror Array

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TitreA Tool for Aided Multi-Scale Model Derivation and its Application to the Simulation of a Micro Mirror Array
Type de publicationConference Paper
Year of Publication2017
AuteursBelkhir W, Ratier N, Nguyen DDuc, Trinh NNhat Binh, Lenczner M, Zamkotsian F
Conference Name2017 18TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME)
PublisherIEEE
Conference Location345 E 47TH ST, NEW YORK, NY 10017 USA
ISBN Number978-1-5090-4344-6
Mots-clésExtension-Combination Method, micro-mirror array, Periodic Homogenization, Rewriting Strategies
Résumé

Modeling the electric field in a matrix of micro-mirrors is presented as the first application of the MEMSALab software package. The latter is dedicated to semi-automated derivation of multiscale models by asymptotic methods and will complement simulation software as finite element software. It is designed according to a principle of reusability which is called the extension-combination method developed with techniques derived from the theory of rewriting.