The design, fabrication and characterization of fluidic membranes for micro-engines with the aim of frequency lowering

This paper describes the design, microfabrication and linear dynamic characterization of low frequency thick membranes as a potential technological solution for resonant microengines, for which classical pistons cannot be used. The proposed structure is called a hybrid fluid-membrane and consists of two thin flexible membranes that encapsulate an incompressible fluid. Lower frequency structures, compared to geometrically equivalent single layer membranes, are thus obtained. Each flexible membrane is based on a composite structure which comprises a silicon planar logarithmic spiral spring embedded in a room temperature vulcanization silicone polymer. Thus, the stiffness and sealing features are dissociated for a better design control. The developed realization and assembly process is demonstrated at the wafer level. The process involves the anodic bonding of multiple stacks of silicon/glass structures, fluid filling and sealing. Various dimensions of hybrid fluid-membranes are successfully fabricated. Their dynamic characterization underlines the agreement between experimental and theoretical results. The results provide the opportunity for the design and fabrication of low frequency membranes to match the dynamics requirements of micro-engines.